6/12/2012	9:26:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/12/2012	9:26:37 AM	Recipe started at 9:26 AM
6/12/2012	9:26:37 AM	Helium valve closed
6/12/2012	9:26:37 AM	H2 valve closed
6/12/2012	9:26:37 AM	BCl3 valve closed
6/12/2012	9:26:37 AM	PH3 valve closed
6/12/2012	9:26:37 AM	SiCl4 pre valve closed
6/12/2012	9:26:37 AM	SiCl4 post valve closed
6/12/2012	9:26:37 AM	Main Vac valve closed
6/12/2012	9:26:37 AM	Bypass valve closed
6/12/2012	9:26:37 AM	Bubbler valve closed
6/12/2012	9:26:37 AM	Helium MFC set to  0.000000
6/12/2012	9:26:37 AM	H2 MFC set to  0.000000
6/12/2012	9:26:37 AM	BCl3 MFC set to  0.000000
6/12/2012	9:26:37 AM	PH3 MFC set to  0.000000
6/12/2012	9:26:37 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:26:37 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:26:37 AM	Tube furnace set to 0
6/12/2012	9:26:40 AM	H2 valve closed
6/12/2012	9:26:40 AM	BCl3 valve closed
6/12/2012	9:26:40 AM	PH3 valve closed
6/12/2012	9:26:40 AM	SiCl4 pre valve closed
6/12/2012	9:26:40 AM	SiCl4 post valve closed
6/12/2012	9:26:40 AM	Main Vac valve closed
6/12/2012	9:26:40 AM	Bypass valve closed
6/12/2012	9:26:40 AM	Bubbler valve closed
6/12/2012	9:26:40 AM	Helium valve opened
6/12/2012	9:26:40 AM	Helium MFC set to  500.000000
6/12/2012	9:26:40 AM	H2 MFC set to  0.000000
6/12/2012	9:26:40 AM	BCl3 MFC set to  0.000000
6/12/2012	9:26:40 AM	PH3 MFC set to  0.000000
6/12/2012	9:26:40 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:26:40 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:26:40 AM	Tube furnace set to 0
6/12/2012	9:27:53 AM	Helium valve closed
6/12/2012	9:27:53 AM	H2 valve closed
6/12/2012	9:27:53 AM	BCl3 valve closed
6/12/2012	9:27:53 AM	PH3 valve closed
6/12/2012	9:27:53 AM	SiCl4 pre valve closed
6/12/2012	9:27:53 AM	SiCl4 post valve closed
6/12/2012	9:27:53 AM	Main Vac valve closed
6/12/2012	9:27:53 AM	Bypass valve closed
6/12/2012	9:27:53 AM	Bubbler valve closed
6/12/2012	9:27:53 AM	Helium MFC set to  0.000000
6/12/2012	9:27:53 AM	H2 MFC set to  0.000000
6/12/2012	9:27:53 AM	BCl3 MFC set to  0.000000
6/12/2012	9:27:53 AM	PH3 MFC set to  0.000000
6/12/2012	9:27:53 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:27:53 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:27:53 AM	Tube furnace set to 0
6/12/2012	9:27:54 AM	Run finished at 9:27 AM
6/12/2012	9:27:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/12/2012	9:31:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/12/2012	9:31:22 AM	Recipe started at 9:31 AM
6/12/2012	9:31:22 AM	Helium valve closed
6/12/2012	9:31:22 AM	H2 valve closed
6/12/2012	9:31:22 AM	BCl3 valve closed
6/12/2012	9:31:22 AM	PH3 valve closed
6/12/2012	9:31:22 AM	SiCl4 pre valve closed
6/12/2012	9:31:22 AM	SiCl4 post valve closed
6/12/2012	9:31:22 AM	Main Vac valve closed
6/12/2012	9:31:22 AM	Bubbler valve closed
6/12/2012	9:31:23 AM	Bypass valve opened
6/12/2012	9:31:23 AM	Helium MFC set to  0.000000
6/12/2012	9:31:23 AM	H2 MFC set to  0.000000
6/12/2012	9:31:23 AM	BCl3 MFC set to  0.000000
6/12/2012	9:31:23 AM	PH3 MFC set to  0.000000
6/12/2012	9:31:23 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:31:23 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:31:23 AM	Tube furnace set to 0
6/12/2012	9:32:32 AM	Helium valve closed
6/12/2012	9:32:32 AM	H2 valve closed
6/12/2012	9:32:32 AM	BCl3 valve closed
6/12/2012	9:32:32 AM	PH3 valve closed
6/12/2012	9:32:32 AM	SiCl4 pre valve closed
6/12/2012	9:32:32 AM	SiCl4 post valve closed
6/12/2012	9:32:32 AM	Main Vac valve closed
6/12/2012	9:32:32 AM	Bubbler valve closed
6/12/2012	9:32:32 AM	Bypass valve opened
6/12/2012	9:32:32 AM	Helium MFC set to  0.000000
6/12/2012	9:32:32 AM	H2 MFC set to  0.000000
6/12/2012	9:32:32 AM	BCl3 MFC set to  0.000000
6/12/2012	9:32:32 AM	PH3 MFC set to  0.000000
6/12/2012	9:32:32 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:32:32 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:32:32 AM	Tube furnace set to 0
6/12/2012	9:33:32 AM	Helium valve closed
6/12/2012	9:33:32 AM	H2 valve closed
6/12/2012	9:33:32 AM	BCl3 valve closed
6/12/2012	9:33:32 AM	PH3 valve closed
6/12/2012	9:33:32 AM	SiCl4 pre valve closed
6/12/2012	9:33:32 AM	SiCl4 post valve closed
6/12/2012	9:33:32 AM	Bypass valve closed
6/12/2012	9:33:32 AM	Bubbler valve closed
6/12/2012	9:33:32 AM	Main Vac valve opened
6/12/2012	9:33:32 AM	Helium MFC set to  0.000000
6/12/2012	9:33:32 AM	H2 MFC set to  0.000000
6/12/2012	9:33:32 AM	BCl3 MFC set to  0.000000
6/12/2012	9:33:32 AM	PH3 MFC set to  0.000000
6/12/2012	9:33:32 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:33:32 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:33:32 AM	Tube furnace set to 0
6/12/2012	9:33:33 AM	Run finished at 9:33 AM
6/12/2012	9:33:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/12/2012	9:35:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/12/2012	9:35:16 AM	Recipe started at 9:35 AM
6/12/2012	9:35:16 AM	Helium valve closed
6/12/2012	9:35:16 AM	H2 valve closed
6/12/2012	9:35:16 AM	BCl3 valve closed
6/12/2012	9:35:16 AM	PH3 valve closed
6/12/2012	9:35:16 AM	SiCl4 pre valve closed
6/12/2012	9:35:16 AM	SiCl4 post valve closed
6/12/2012	9:35:16 AM	Main Vac valve closed
6/12/2012	9:35:16 AM	Bypass valve closed
6/12/2012	9:35:16 AM	Bubbler valve closed
6/12/2012	9:35:16 AM	Helium MFC set to  0.000000
6/12/2012	9:35:16 AM	H2 MFC set to  0.000000
6/12/2012	9:35:16 AM	BCl3 MFC set to  0.000000
6/12/2012	9:35:16 AM	PH3 MFC set to  0.000000
6/12/2012	9:35:16 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:35:16 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:35:16 AM	Tube furnace set to 0
6/12/2012	9:35:19 AM	H2 valve closed
6/12/2012	9:35:19 AM	BCl3 valve closed
6/12/2012	9:35:19 AM	PH3 valve closed
6/12/2012	9:35:19 AM	SiCl4 pre valve closed
6/12/2012	9:35:19 AM	SiCl4 post valve closed
6/12/2012	9:35:19 AM	Main Vac valve closed
6/12/2012	9:35:19 AM	Bypass valve closed
6/12/2012	9:35:19 AM	Bubbler valve closed
6/12/2012	9:35:19 AM	Helium valve opened
6/12/2012	9:35:19 AM	Helium MFC set to  500.000000
6/12/2012	9:35:19 AM	H2 MFC set to  0.000000
6/12/2012	9:35:19 AM	BCl3 MFC set to  0.000000
6/12/2012	9:35:19 AM	PH3 MFC set to  0.000000
6/12/2012	9:35:19 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:35:19 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:35:19 AM	Tube furnace set to 0
6/12/2012	9:36:34 AM	Helium valve closed
6/12/2012	9:36:34 AM	H2 valve closed
6/12/2012	9:36:34 AM	BCl3 valve closed
6/12/2012	9:36:34 AM	PH3 valve closed
6/12/2012	9:36:34 AM	SiCl4 pre valve closed
6/12/2012	9:36:34 AM	SiCl4 post valve closed
6/12/2012	9:36:34 AM	Main Vac valve closed
6/12/2012	9:36:34 AM	Bypass valve closed
6/12/2012	9:36:34 AM	Bubbler valve closed
6/12/2012	9:36:34 AM	Helium MFC set to  0.000000
6/12/2012	9:36:34 AM	H2 MFC set to  0.000000
6/12/2012	9:36:34 AM	BCl3 MFC set to  0.000000
6/12/2012	9:36:34 AM	PH3 MFC set to  0.000000
6/12/2012	9:36:34 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:36:34 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:36:34 AM	Tube furnace set to 0
6/12/2012	9:36:35 AM	Run finished at 9:36 AM
6/12/2012	9:36:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/12/2012	9:39:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/12/2012	9:39:38 AM	Recipe started at 9:39 AM
6/12/2012	9:39:38 AM	Helium valve closed
6/12/2012	9:39:38 AM	H2 valve closed
6/12/2012	9:39:38 AM	BCl3 valve closed
6/12/2012	9:39:38 AM	PH3 valve closed
6/12/2012	9:39:38 AM	SiCl4 pre valve closed
6/12/2012	9:39:38 AM	SiCl4 post valve closed
6/12/2012	9:39:38 AM	Main Vac valve closed
6/12/2012	9:39:38 AM	Bubbler valve closed
6/12/2012	9:39:38 AM	Bypass valve opened
6/12/2012	9:39:38 AM	Helium MFC set to  0.000000
6/12/2012	9:39:38 AM	H2 MFC set to  0.000000
6/12/2012	9:39:38 AM	BCl3 MFC set to  0.000000
6/12/2012	9:39:38 AM	PH3 MFC set to  0.000000
6/12/2012	9:39:38 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:39:38 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:39:38 AM	Tube furnace set to 0
6/12/2012	9:40:46 AM	Helium valve closed
6/12/2012	9:40:46 AM	H2 valve closed
6/12/2012	9:40:46 AM	BCl3 valve closed
6/12/2012	9:40:46 AM	PH3 valve closed
6/12/2012	9:40:46 AM	SiCl4 pre valve closed
6/12/2012	9:40:46 AM	SiCl4 post valve closed
6/12/2012	9:40:46 AM	Main Vac valve closed
6/12/2012	9:40:46 AM	Bubbler valve closed
6/12/2012	9:40:46 AM	Bypass valve opened
6/12/2012	9:40:46 AM	Helium MFC set to  0.000000
6/12/2012	9:40:46 AM	H2 MFC set to  0.000000
6/12/2012	9:40:46 AM	BCl3 MFC set to  0.000000
6/12/2012	9:40:46 AM	PH3 MFC set to  0.000000
6/12/2012	9:40:46 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:40:46 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:40:47 AM	Tube furnace set to 0
6/12/2012	9:41:47 AM	Helium valve closed
6/12/2012	9:41:47 AM	H2 valve closed
6/12/2012	9:41:47 AM	BCl3 valve closed
6/12/2012	9:41:47 AM	PH3 valve closed
6/12/2012	9:41:47 AM	SiCl4 pre valve closed
6/12/2012	9:41:47 AM	SiCl4 post valve closed
6/12/2012	9:41:47 AM	Bypass valve closed
6/12/2012	9:41:47 AM	Bubbler valve closed
6/12/2012	9:41:47 AM	Main Vac valve opened
6/12/2012	9:41:47 AM	Helium MFC set to  0.000000
6/12/2012	9:41:47 AM	H2 MFC set to  0.000000
6/12/2012	9:41:47 AM	BCl3 MFC set to  0.000000
6/12/2012	9:41:47 AM	PH3 MFC set to  0.000000
6/12/2012	9:41:47 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:41:47 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:41:47 AM	Tube furnace set to 0
6/12/2012	9:41:48 AM	Run finished at 9:41 AM
6/12/2012	9:41:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/12/2012	9:59:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/12/2012	9:59:55 AM	Recipe started at 9:59 AM
6/12/2012	9:59:55 AM	Helium valve closed
6/12/2012	9:59:55 AM	H2 valve closed
6/12/2012	9:59:55 AM	BCl3 valve closed
6/12/2012	9:59:55 AM	PH3 valve closed
6/12/2012	9:59:55 AM	SiCl4 pre valve closed
6/12/2012	9:59:55 AM	SiCl4 post valve closed
6/12/2012	9:59:55 AM	Main Vac valve closed
6/12/2012	9:59:55 AM	Bubbler valve closed
6/12/2012	9:59:55 AM	Bypass valve opened
6/12/2012	9:59:55 AM	Helium MFC set to  0.000000
6/12/2012	9:59:55 AM	H2 MFC set to  0.000000
6/12/2012	9:59:55 AM	BCl3 MFC set to  0.000000
6/12/2012	9:59:55 AM	PH3 MFC set to  0.000000
6/12/2012	9:59:55 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:59:55 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:59:55 AM	Tube furnace set to 0
6/12/2012	9:59:56 AM	Helium valve closed
6/12/2012	9:59:56 AM	H2 valve closed
6/12/2012	9:59:56 AM	BCl3 valve closed
6/12/2012	9:59:56 AM	PH3 valve closed
6/12/2012	9:59:56 AM	SiCl4 pre valve closed
6/12/2012	9:59:56 AM	SiCl4 post valve closed
6/12/2012	9:59:56 AM	Main Vac valve closed
6/12/2012	9:59:56 AM	Bubbler valve closed
6/12/2012	9:59:56 AM	Bypass valve opened
6/12/2012	9:59:56 AM	Helium MFC set to  0.000000
6/12/2012	9:59:56 AM	H2 MFC set to  0.000000
6/12/2012	9:59:56 AM	BCl3 MFC set to  0.000000
6/12/2012	9:59:56 AM	PH3 MFC set to  0.000000
6/12/2012	9:59:56 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:59:56 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:59:56 AM	Tube furnace set to 0
6/12/2012	9:59:57 AM	Helium valve closed
6/12/2012	9:59:57 AM	H2 valve closed
6/12/2012	9:59:57 AM	BCl3 valve closed
6/12/2012	9:59:57 AM	PH3 valve closed
6/12/2012	9:59:57 AM	SiCl4 pre valve closed
6/12/2012	9:59:57 AM	SiCl4 post valve closed
6/12/2012	9:59:57 AM	Bypass valve closed
6/12/2012	9:59:57 AM	Bubbler valve closed
6/12/2012	9:59:57 AM	Main Vac valve opened
6/12/2012	9:59:57 AM	Helium MFC set to  0.000000
6/12/2012	9:59:57 AM	H2 MFC set to  0.000000
6/12/2012	9:59:57 AM	BCl3 MFC set to  0.000000
6/12/2012	9:59:57 AM	PH3 MFC set to  0.000000
6/12/2012	9:59:57 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:59:57 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:59:57 AM	Tube furnace set to 0
6/12/2012	9:59:58 AM	H2 valve closed
6/12/2012	9:59:58 AM	BCl3 valve closed
6/12/2012	9:59:58 AM	PH3 valve closed
6/12/2012	9:59:58 AM	SiCl4 pre valve closed
6/12/2012	9:59:58 AM	SiCl4 post valve closed
6/12/2012	9:59:58 AM	Bypass valve closed
6/12/2012	9:59:58 AM	Bubbler valve closed
6/12/2012	9:59:58 AM	Helium valve opened
6/12/2012	9:59:58 AM	Main Vac valve opened
6/12/2012	9:59:58 AM	Helium MFC set to  20.000000
6/12/2012	9:59:58 AM	H2 MFC set to  0.000000
6/12/2012	9:59:58 AM	BCl3 MFC set to  0.000000
6/12/2012	9:59:58 AM	PH3 MFC set to  0.000000
6/12/2012	9:59:58 AM	SiCl4 MFC set to  0.000000
6/12/2012	9:59:58 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	9:59:58 AM	Tube furnace set to 0
6/12/2012	10:00:28 AM	Helium valve closed
6/12/2012	10:00:28 AM	H2 valve closed
6/12/2012	10:00:28 AM	BCl3 valve closed
6/12/2012	10:00:28 AM	PH3 valve closed
6/12/2012	10:00:28 AM	SiCl4 pre valve closed
6/12/2012	10:00:28 AM	SiCl4 post valve closed
6/12/2012	10:00:28 AM	Bypass valve closed
6/12/2012	10:00:28 AM	Bubbler valve closed
6/12/2012	10:00:28 AM	Main Vac valve opened
6/12/2012	10:00:28 AM	Helium MFC set to  0.000000
6/12/2012	10:00:28 AM	H2 MFC set to  0.000000
6/12/2012	10:00:28 AM	BCl3 MFC set to  0.000000
6/12/2012	10:00:28 AM	PH3 MFC set to  0.000000
6/12/2012	10:00:28 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:00:28 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:00:28 AM	Tube furnace set to 0
6/12/2012	10:00:58 AM	H2 valve closed
6/12/2012	10:00:58 AM	BCl3 valve closed
6/12/2012	10:00:58 AM	PH3 valve closed
6/12/2012	10:00:58 AM	SiCl4 pre valve closed
6/12/2012	10:00:58 AM	SiCl4 post valve closed
6/12/2012	10:00:58 AM	Bypass valve closed
6/12/2012	10:00:58 AM	Bubbler valve closed
6/12/2012	10:00:58 AM	Helium valve opened
6/12/2012	10:00:58 AM	Main Vac valve opened
6/12/2012	10:00:58 AM	Helium MFC set to  20.000000
6/12/2012	10:00:58 AM	H2 MFC set to  0.000000
6/12/2012	10:00:58 AM	BCl3 MFC set to  0.000000
6/12/2012	10:00:58 AM	PH3 MFC set to  0.000000
6/12/2012	10:00:58 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:00:58 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:00:58 AM	Tube furnace set to 0
6/12/2012	10:01:28 AM	Helium valve closed
6/12/2012	10:01:28 AM	H2 valve closed
6/12/2012	10:01:28 AM	BCl3 valve closed
6/12/2012	10:01:28 AM	PH3 valve closed
6/12/2012	10:01:28 AM	SiCl4 pre valve closed
6/12/2012	10:01:28 AM	SiCl4 post valve closed
6/12/2012	10:01:28 AM	Bypass valve closed
6/12/2012	10:01:28 AM	Bubbler valve closed
6/12/2012	10:01:28 AM	Main Vac valve opened
6/12/2012	10:01:28 AM	Helium MFC set to  0.000000
6/12/2012	10:01:28 AM	H2 MFC set to  0.000000
6/12/2012	10:01:28 AM	BCl3 MFC set to  0.000000
6/12/2012	10:01:28 AM	PH3 MFC set to  0.000000
6/12/2012	10:01:28 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:01:28 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:01:29 AM	Tube furnace set to 0
6/12/2012	10:01:59 AM	H2 valve closed
6/12/2012	10:01:59 AM	BCl3 valve closed
6/12/2012	10:01:59 AM	PH3 valve closed
6/12/2012	10:01:59 AM	SiCl4 pre valve closed
6/12/2012	10:01:59 AM	SiCl4 post valve closed
6/12/2012	10:01:59 AM	Bypass valve closed
6/12/2012	10:01:59 AM	Bubbler valve closed
6/12/2012	10:01:59 AM	Helium valve opened
6/12/2012	10:01:59 AM	Main Vac valve opened
6/12/2012	10:01:59 AM	Helium MFC set to  20.000000
6/12/2012	10:01:59 AM	H2 MFC set to  0.000000
6/12/2012	10:01:59 AM	BCl3 MFC set to  0.000000
6/12/2012	10:01:59 AM	PH3 MFC set to  0.000000
6/12/2012	10:01:59 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:01:59 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:01:59 AM	Tube furnace set to 0
6/12/2012	10:02:29 AM	Helium valve closed
6/12/2012	10:02:29 AM	H2 valve closed
6/12/2012	10:02:29 AM	BCl3 valve closed
6/12/2012	10:02:29 AM	PH3 valve closed
6/12/2012	10:02:29 AM	SiCl4 pre valve closed
6/12/2012	10:02:29 AM	SiCl4 post valve closed
6/12/2012	10:02:29 AM	Bypass valve closed
6/12/2012	10:02:29 AM	Bubbler valve closed
6/12/2012	10:02:29 AM	Main Vac valve opened
6/12/2012	10:02:29 AM	Helium MFC set to  0.000000
6/12/2012	10:02:29 AM	H2 MFC set to  0.000000
6/12/2012	10:02:29 AM	BCl3 MFC set to  0.000000
6/12/2012	10:02:29 AM	PH3 MFC set to  0.000000
6/12/2012	10:02:29 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:02:29 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:02:29 AM	Tube furnace set to 0
6/12/2012	10:02:59 AM	H2 valve closed
6/12/2012	10:02:59 AM	BCl3 valve closed
6/12/2012	10:02:59 AM	PH3 valve closed
6/12/2012	10:02:59 AM	SiCl4 pre valve closed
6/12/2012	10:02:59 AM	SiCl4 post valve closed
6/12/2012	10:02:59 AM	Bypass valve closed
6/12/2012	10:02:59 AM	Bubbler valve closed
6/12/2012	10:02:59 AM	Helium valve opened
6/12/2012	10:02:59 AM	Main Vac valve opened
6/12/2012	10:02:59 AM	Helium MFC set to  20.000000
6/12/2012	10:02:59 AM	H2 MFC set to  0.000000
6/12/2012	10:02:59 AM	BCl3 MFC set to  0.000000
6/12/2012	10:02:59 AM	PH3 MFC set to  0.000000
6/12/2012	10:02:59 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:02:59 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:02:59 AM	Tube furnace set to 0
6/12/2012	10:03:29 AM	Helium valve closed
6/12/2012	10:03:29 AM	H2 valve closed
6/12/2012	10:03:29 AM	BCl3 valve closed
6/12/2012	10:03:29 AM	PH3 valve closed
6/12/2012	10:03:29 AM	SiCl4 pre valve closed
6/12/2012	10:03:29 AM	SiCl4 post valve closed
6/12/2012	10:03:29 AM	Bypass valve closed
6/12/2012	10:03:29 AM	Bubbler valve closed
6/12/2012	10:03:29 AM	Main Vac valve opened
6/12/2012	10:03:29 AM	Helium MFC set to  0.000000
6/12/2012	10:03:29 AM	H2 MFC set to  0.000000
6/12/2012	10:03:29 AM	BCl3 MFC set to  0.000000
6/12/2012	10:03:29 AM	PH3 MFC set to  0.000000
6/12/2012	10:03:29 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:03:29 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:03:30 AM	Tube furnace set to 0
6/12/2012	10:04:00 AM	H2 valve closed
6/12/2012	10:04:00 AM	BCl3 valve closed
6/12/2012	10:04:00 AM	PH3 valve closed
6/12/2012	10:04:00 AM	SiCl4 pre valve closed
6/12/2012	10:04:00 AM	SiCl4 post valve closed
6/12/2012	10:04:00 AM	Bypass valve closed
6/12/2012	10:04:00 AM	Bubbler valve closed
6/12/2012	10:04:00 AM	Helium valve opened
6/12/2012	10:04:00 AM	Main Vac valve opened
6/12/2012	10:04:00 AM	Helium MFC set to  20.000000
6/12/2012	10:04:00 AM	H2 MFC set to  0.000000
6/12/2012	10:04:00 AM	BCl3 MFC set to  0.000000
6/12/2012	10:04:00 AM	PH3 MFC set to  0.000000
6/12/2012	10:04:00 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:04:00 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:04:00 AM	Tube furnace set to 0
6/12/2012	10:04:30 AM	Helium valve closed
6/12/2012	10:04:30 AM	H2 valve closed
6/12/2012	10:04:30 AM	BCl3 valve closed
6/12/2012	10:04:30 AM	PH3 valve closed
6/12/2012	10:04:30 AM	SiCl4 pre valve closed
6/12/2012	10:04:30 AM	SiCl4 post valve closed
6/12/2012	10:04:30 AM	Bypass valve closed
6/12/2012	10:04:30 AM	Bubbler valve closed
6/12/2012	10:04:30 AM	Main Vac valve opened
6/12/2012	10:04:30 AM	Helium MFC set to  0.000000
6/12/2012	10:04:30 AM	H2 MFC set to  0.000000
6/12/2012	10:04:30 AM	BCl3 MFC set to  0.000000
6/12/2012	10:04:30 AM	PH3 MFC set to  0.000000
6/12/2012	10:04:30 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:04:30 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:04:30 AM	Tube furnace set to 0
6/12/2012	10:05:00 AM	H2 valve closed
6/12/2012	10:05:00 AM	BCl3 valve closed
6/12/2012	10:05:00 AM	PH3 valve closed
6/12/2012	10:05:00 AM	SiCl4 pre valve closed
6/12/2012	10:05:00 AM	SiCl4 post valve closed
6/12/2012	10:05:00 AM	Bypass valve closed
6/12/2012	10:05:00 AM	Bubbler valve closed
6/12/2012	10:05:00 AM	Helium valve opened
6/12/2012	10:05:00 AM	Main Vac valve opened
6/12/2012	10:05:00 AM	Helium MFC set to  20.000000
6/12/2012	10:05:00 AM	H2 MFC set to  0.000000
6/12/2012	10:05:00 AM	BCl3 MFC set to  0.000000
6/12/2012	10:05:00 AM	PH3 MFC set to  0.000000
6/12/2012	10:05:00 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:05:00 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:05:00 AM	Tube furnace set to 0
6/12/2012	10:05:30 AM	Helium valve closed
6/12/2012	10:05:30 AM	H2 valve closed
6/12/2012	10:05:30 AM	BCl3 valve closed
6/12/2012	10:05:30 AM	PH3 valve closed
6/12/2012	10:05:30 AM	SiCl4 pre valve closed
6/12/2012	10:05:30 AM	SiCl4 post valve closed
6/12/2012	10:05:30 AM	Bypass valve closed
6/12/2012	10:05:30 AM	Bubbler valve closed
6/12/2012	10:05:30 AM	Main Vac valve opened
6/12/2012	10:05:30 AM	Helium MFC set to  0.000000
6/12/2012	10:05:30 AM	H2 MFC set to  0.000000
6/12/2012	10:05:30 AM	BCl3 MFC set to  0.000000
6/12/2012	10:05:30 AM	PH3 MFC set to  0.000000
6/12/2012	10:05:30 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:05:30 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:05:30 AM	Tube furnace set to 0
6/12/2012	10:06:00 AM	H2 valve closed
6/12/2012	10:06:00 AM	BCl3 valve closed
6/12/2012	10:06:00 AM	PH3 valve closed
6/12/2012	10:06:01 AM	SiCl4 pre valve closed
6/12/2012	10:06:01 AM	SiCl4 post valve closed
6/12/2012	10:06:01 AM	Bypass valve closed
6/12/2012	10:06:01 AM	Bubbler valve closed
6/12/2012	10:06:01 AM	Helium valve opened
6/12/2012	10:06:01 AM	Main Vac valve opened
6/12/2012	10:06:01 AM	Helium MFC set to  20.000000
6/12/2012	10:06:01 AM	H2 MFC set to  0.000000
6/12/2012	10:06:01 AM	BCl3 MFC set to  0.000000
6/12/2012	10:06:01 AM	PH3 MFC set to  0.000000
6/12/2012	10:06:01 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:06:01 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:06:01 AM	Tube furnace set to 0
6/12/2012	10:06:31 AM	Helium valve closed
6/12/2012	10:06:31 AM	H2 valve closed
6/12/2012	10:06:31 AM	BCl3 valve closed
6/12/2012	10:06:31 AM	PH3 valve closed
6/12/2012	10:06:31 AM	SiCl4 pre valve closed
6/12/2012	10:06:31 AM	SiCl4 post valve closed
6/12/2012	10:06:31 AM	Bypass valve closed
6/12/2012	10:06:31 AM	Bubbler valve closed
6/12/2012	10:06:31 AM	Main Vac valve opened
6/12/2012	10:06:31 AM	Helium MFC set to  0.000000
6/12/2012	10:06:31 AM	H2 MFC set to  0.000000
6/12/2012	10:06:31 AM	BCl3 MFC set to  0.000000
6/12/2012	10:06:31 AM	PH3 MFC set to  0.000000
6/12/2012	10:06:31 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:06:31 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:06:31 AM	Tube furnace set to 0
6/12/2012	10:07:01 AM	H2 valve closed
6/12/2012	10:07:01 AM	BCl3 valve closed
6/12/2012	10:07:01 AM	PH3 valve closed
6/12/2012	10:07:01 AM	SiCl4 pre valve closed
6/12/2012	10:07:01 AM	SiCl4 post valve closed
6/12/2012	10:07:01 AM	Bypass valve closed
6/12/2012	10:07:01 AM	Bubbler valve closed
6/12/2012	10:07:01 AM	Helium valve opened
6/12/2012	10:07:01 AM	Main Vac valve opened
6/12/2012	10:07:01 AM	Helium MFC set to  20.000000
6/12/2012	10:07:01 AM	H2 MFC set to  0.000000
6/12/2012	10:07:01 AM	BCl3 MFC set to  0.000000
6/12/2012	10:07:01 AM	PH3 MFC set to  0.000000
6/12/2012	10:07:01 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:07:01 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:07:01 AM	Tube furnace set to 0
6/12/2012	10:07:31 AM	Helium valve closed
6/12/2012	10:07:31 AM	H2 valve closed
6/12/2012	10:07:31 AM	BCl3 valve closed
6/12/2012	10:07:31 AM	PH3 valve closed
6/12/2012	10:07:31 AM	SiCl4 pre valve closed
6/12/2012	10:07:31 AM	SiCl4 post valve closed
6/12/2012	10:07:31 AM	Bypass valve closed
6/12/2012	10:07:31 AM	Bubbler valve closed
6/12/2012	10:07:31 AM	Main Vac valve opened
6/12/2012	10:07:31 AM	Helium MFC set to  0.000000
6/12/2012	10:07:31 AM	H2 MFC set to  0.000000
6/12/2012	10:07:31 AM	BCl3 MFC set to  0.000000
6/12/2012	10:07:31 AM	PH3 MFC set to  0.000000
6/12/2012	10:07:31 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:07:31 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:07:31 AM	Tube furnace set to 0
6/12/2012	10:08:01 AM	H2 valve closed
6/12/2012	10:08:01 AM	BCl3 valve closed
6/12/2012	10:08:01 AM	PH3 valve closed
6/12/2012	10:08:01 AM	SiCl4 pre valve closed
6/12/2012	10:08:01 AM	SiCl4 post valve closed
6/12/2012	10:08:01 AM	Bypass valve closed
6/12/2012	10:08:01 AM	Bubbler valve closed
6/12/2012	10:08:01 AM	Helium valve opened
6/12/2012	10:08:01 AM	Main Vac valve opened
6/12/2012	10:08:01 AM	Helium MFC set to  20.000000
6/12/2012	10:08:01 AM	H2 MFC set to  0.000000
6/12/2012	10:08:01 AM	BCl3 MFC set to  0.000000
6/12/2012	10:08:01 AM	PH3 MFC set to  0.000000
6/12/2012	10:08:01 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:08:01 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:08:02 AM	Tube furnace set to 0
6/12/2012	10:08:32 AM	Helium valve closed
6/12/2012	10:08:32 AM	H2 valve closed
6/12/2012	10:08:32 AM	BCl3 valve closed
6/12/2012	10:08:32 AM	PH3 valve closed
6/12/2012	10:08:32 AM	SiCl4 pre valve closed
6/12/2012	10:08:32 AM	SiCl4 post valve closed
6/12/2012	10:08:32 AM	Bypass valve closed
6/12/2012	10:08:32 AM	Bubbler valve closed
6/12/2012	10:08:32 AM	Main Vac valve opened
6/12/2012	10:08:32 AM	Helium MFC set to  0.000000
6/12/2012	10:08:32 AM	H2 MFC set to  0.000000
6/12/2012	10:08:32 AM	BCl3 MFC set to  0.000000
6/12/2012	10:08:32 AM	PH3 MFC set to  0.000000
6/12/2012	10:08:32 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:08:32 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:08:32 AM	Tube furnace set to 0
6/12/2012	10:09:02 AM	H2 valve closed
6/12/2012	10:09:02 AM	BCl3 valve closed
6/12/2012	10:09:02 AM	PH3 valve closed
6/12/2012	10:09:02 AM	SiCl4 pre valve closed
6/12/2012	10:09:02 AM	SiCl4 post valve closed
6/12/2012	10:09:02 AM	Bypass valve closed
6/12/2012	10:09:02 AM	Bubbler valve closed
6/12/2012	10:09:02 AM	Helium valve opened
6/12/2012	10:09:02 AM	Main Vac valve opened
6/12/2012	10:09:02 AM	Helium MFC set to  20.000000
6/12/2012	10:09:02 AM	H2 MFC set to  0.000000
6/12/2012	10:09:02 AM	BCl3 MFC set to  0.000000
6/12/2012	10:09:02 AM	PH3 MFC set to  0.000000
6/12/2012	10:09:02 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:09:02 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:09:02 AM	Tube furnace set to 0
6/12/2012	10:09:32 AM	Helium valve closed
6/12/2012	10:09:32 AM	H2 valve closed
6/12/2012	10:09:32 AM	BCl3 valve closed
6/12/2012	10:09:32 AM	PH3 valve closed
6/12/2012	10:09:32 AM	SiCl4 pre valve closed
6/12/2012	10:09:32 AM	SiCl4 post valve closed
6/12/2012	10:09:32 AM	Bypass valve closed
6/12/2012	10:09:32 AM	Bubbler valve closed
6/12/2012	10:09:32 AM	Main Vac valve opened
6/12/2012	10:09:32 AM	Helium MFC set to  0.000000
6/12/2012	10:09:32 AM	H2 MFC set to  0.000000
6/12/2012	10:09:32 AM	BCl3 MFC set to  0.000000
6/12/2012	10:09:32 AM	PH3 MFC set to  0.000000
6/12/2012	10:09:32 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:09:32 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:09:32 AM	Tube furnace set to 0
6/12/2012	10:09:33 AM	Run finished at 10:09 AM
6/12/2012	10:09:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/12/2012	10:14:27 AM	Recipe started at 10:14 AM
6/12/2012	10:14:27 AM	Helium valve closed
6/12/2012	10:14:27 AM	H2 valve closed
6/12/2012	10:14:27 AM	BCl3 valve closed
6/12/2012	10:14:27 AM	PH3 valve closed
6/12/2012	10:14:27 AM	SiCl4 pre valve closed
6/12/2012	10:14:27 AM	SiCl4 post valve closed
6/12/2012	10:14:27 AM	Main Vac valve closed
6/12/2012	10:14:27 AM	Bypass valve closed
6/12/2012	10:14:27 AM	Bubbler valve closed
6/12/2012	10:14:27 AM	Helium MFC set to  0.000000
6/12/2012	10:14:27 AM	H2 MFC set to  0.000000
6/12/2012	10:14:27 AM	BCl3 MFC set to  0.000000
6/12/2012	10:14:27 AM	PH3 MFC set to  0.000000
6/12/2012	10:14:27 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:14:27 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:14:27 AM	Tube furnace set to 0
6/12/2012	10:14:30 AM	Helium valve closed
6/12/2012	10:14:30 AM	BCl3 valve closed
6/12/2012	10:14:30 AM	PH3 valve closed
6/12/2012	10:14:30 AM	SiCl4 pre valve closed
6/12/2012	10:14:30 AM	SiCl4 post valve closed
6/12/2012	10:14:30 AM	Main Vac valve closed
6/12/2012	10:14:30 AM	Bypass valve closed
6/12/2012	10:14:30 AM	Bubbler valve closed
6/12/2012	10:14:30 AM	H2 valve opened
6/12/2012	10:14:30 AM	Helium MFC set to  0.000000
6/12/2012	10:14:30 AM	H2 MFC set to  500.000000
6/12/2012	10:14:30 AM	BCl3 MFC set to  0.000000
6/12/2012	10:14:30 AM	PH3 MFC set to  0.000000
6/12/2012	10:14:30 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:14:30 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:14:31 AM	Tube furnace set to 0
6/12/2012	10:15:48 AM	Helium valve closed
6/12/2012	10:15:48 AM	BCl3 valve closed
6/12/2012	10:15:48 AM	PH3 valve closed
6/12/2012	10:15:48 AM	SiCl4 pre valve closed
6/12/2012	10:15:48 AM	SiCl4 post valve closed
6/12/2012	10:15:48 AM	Main Vac valve closed
6/12/2012	10:15:48 AM	Bypass valve closed
6/12/2012	10:15:48 AM	H2 valve opened
6/12/2012	10:15:48 AM	Bubbler valve opened
6/12/2012	10:15:48 AM	Helium MFC set to  0.000000
6/12/2012	10:15:48 AM	H2 MFC set to  500.000000
6/12/2012	10:15:48 AM	BCl3 MFC set to  0.000000
6/12/2012	10:15:48 AM	PH3 MFC set to  0.000000
6/12/2012	10:15:48 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:15:48 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:15:48 AM	Tube furnace set to 0
6/12/2012	10:15:49 AM	Helium valve closed
6/12/2012	10:15:49 AM	BCl3 valve closed
6/12/2012	10:15:49 AM	PH3 valve closed
6/12/2012	10:15:49 AM	SiCl4 pre valve closed
6/12/2012	10:15:49 AM	SiCl4 post valve closed
6/12/2012	10:15:49 AM	Main Vac valve closed
6/12/2012	10:15:49 AM	Bypass valve closed
6/12/2012	10:15:49 AM	H2 valve opened
6/12/2012	10:15:49 AM	Bubbler valve opened
6/12/2012	10:15:49 AM	Helium MFC set to  0.000000
6/12/2012	10:15:49 AM	H2 MFC set to  500.000000
6/12/2012	10:15:49 AM	BCl3 MFC set to  0.000000
6/12/2012	10:15:49 AM	PH3 MFC set to  0.000000
6/12/2012	10:15:49 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:15:49 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:15:49 AM	Tube furnace set to 950
6/12/2012	10:35:49 AM	Helium valve closed
6/12/2012	10:35:49 AM	PH3 valve closed
6/12/2012	10:35:49 AM	Main Vac valve closed
6/12/2012	10:35:49 AM	Bypass valve closed
6/12/2012	10:35:49 AM	H2 valve opened
6/12/2012	10:35:49 AM	BCl3 valve opened
6/12/2012	10:35:49 AM	SiCl4 pre valve opened
6/12/2012	10:35:49 AM	SiCl4 post valve opened
6/12/2012	10:35:49 AM	Bubbler valve opened
6/12/2012	10:35:49 AM	Helium MFC set to  0.000000
6/12/2012	10:35:49 AM	H2 MFC set to  500.000000
6/12/2012	10:35:49 AM	BCl3 MFC set to  1.000000
6/12/2012	10:35:49 AM	PH3 MFC set to  0.000000
6/12/2012	10:35:49 AM	SiCl4 MFC set to  25.000000
6/12/2012	10:35:49 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:35:49 AM	Tube furnace set to 950
6/12/2012	10:55:49 AM	Helium valve closed
6/12/2012	10:55:49 AM	BCl3 valve closed
6/12/2012	10:55:49 AM	PH3 valve closed
6/12/2012	10:55:49 AM	SiCl4 pre valve closed
6/12/2012	10:55:49 AM	SiCl4 post valve closed
6/12/2012	10:55:49 AM	Main Vac valve closed
6/12/2012	10:55:49 AM	Bypass valve closed
6/12/2012	10:55:49 AM	H2 valve opened
6/12/2012	10:55:49 AM	Bubbler valve opened
6/12/2012	10:55:49 AM	Helium MFC set to  0.000000
6/12/2012	10:55:49 AM	H2 MFC set to  500.000000
6/12/2012	10:55:49 AM	BCl3 MFC set to  0.000000
6/12/2012	10:55:49 AM	PH3 MFC set to  0.000000
6/12/2012	10:55:49 AM	SiCl4 MFC set to  0.000000
6/12/2012	10:55:49 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	10:55:49 AM	Tube furnace set to 750
6/12/2012	11:00:50 AM	H2 valve closed
6/12/2012	11:00:50 AM	BCl3 valve closed
6/12/2012	11:00:50 AM	PH3 valve closed
6/12/2012	11:00:50 AM	SiCl4 pre valve closed
6/12/2012	11:00:50 AM	SiCl4 post valve closed
6/12/2012	11:00:50 AM	Main Vac valve closed
6/12/2012	11:00:50 AM	Bypass valve closed
6/12/2012	11:00:50 AM	Helium valve opened
6/12/2012	11:00:50 AM	Bubbler valve opened
6/12/2012	11:00:50 AM	Helium MFC set to  500.000000
6/12/2012	11:00:50 AM	H2 MFC set to  0.000000
6/12/2012	11:00:50 AM	BCl3 MFC set to  0.000000
6/12/2012	11:00:50 AM	PH3 MFC set to  0.000000
6/12/2012	11:00:50 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:00:50 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:00:50 AM	Tube furnace set to 0
6/12/2012	11:14:19 AM	Run aborted at 11:14 AM
6/12/2012	11:14:19 AM	Helium valve closed
6/12/2012	11:14:19 AM	H2 valve closed
6/12/2012	11:14:19 AM	BCl3 valve closed
6/12/2012	11:14:19 AM	PH3 valve closed
6/12/2012	11:14:19 AM	SiCl4 pre valve closed
6/12/2012	11:14:19 AM	SiCl4 post valve closed
6/12/2012	11:14:19 AM	Bypass valve closed
6/12/2012	11:14:19 AM	Main Vac valve closed
6/12/2012	11:14:19 AM	Bubbler valve closed
6/12/2012	11:14:19 AM	Helium MFC set to  0.000000
6/12/2012	11:14:19 AM	H2 MFC set to  0.000000
6/12/2012	11:14:19 AM	BCl3 MFC set to  0.000000
6/12/2012	11:14:19 AM	PH3 MFC set to  0.000000
6/12/2012	11:14:19 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:14:19 AM	Tube furnace set to 0
6/12/2012	11:20:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/12/2012	11:20:42 AM	Recipe started at 11:20 AM
6/12/2012	11:20:42 AM	Helium valve closed
6/12/2012	11:20:42 AM	H2 valve closed
6/12/2012	11:20:42 AM	BCl3 valve closed
6/12/2012	11:20:42 AM	PH3 valve closed
6/12/2012	11:20:42 AM	SiCl4 pre valve closed
6/12/2012	11:20:42 AM	SiCl4 post valve closed
6/12/2012	11:20:42 AM	Main Vac valve closed
6/12/2012	11:20:42 AM	Bubbler valve closed
6/12/2012	11:20:42 AM	Bypass valve opened
6/12/2012	11:20:42 AM	Helium MFC set to  0.000000
6/12/2012	11:20:42 AM	H2 MFC set to  0.000000
6/12/2012	11:20:42 AM	BCl3 MFC set to  0.000000
6/12/2012	11:20:42 AM	PH3 MFC set to  0.000000
6/12/2012	11:20:42 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:20:42 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:20:42 AM	Tube furnace set to 0
6/12/2012	11:21:52 AM	Helium valve closed
6/12/2012	11:21:52 AM	H2 valve closed
6/12/2012	11:21:52 AM	BCl3 valve closed
6/12/2012	11:21:52 AM	PH3 valve closed
6/12/2012	11:21:52 AM	SiCl4 pre valve closed
6/12/2012	11:21:52 AM	SiCl4 post valve closed
6/12/2012	11:21:52 AM	Main Vac valve closed
6/12/2012	11:21:52 AM	Bubbler valve closed
6/12/2012	11:21:52 AM	Bypass valve opened
6/12/2012	11:21:52 AM	Helium MFC set to  0.000000
6/12/2012	11:21:52 AM	H2 MFC set to  0.000000
6/12/2012	11:21:52 AM	BCl3 MFC set to  0.000000
6/12/2012	11:21:52 AM	PH3 MFC set to  0.000000
6/12/2012	11:21:53 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:21:53 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:21:53 AM	Tube furnace set to 0
6/12/2012	11:22:53 AM	Helium valve closed
6/12/2012	11:22:53 AM	H2 valve closed
6/12/2012	11:22:53 AM	BCl3 valve closed
6/12/2012	11:22:53 AM	PH3 valve closed
6/12/2012	11:22:53 AM	SiCl4 pre valve closed
6/12/2012	11:22:53 AM	SiCl4 post valve closed
6/12/2012	11:22:53 AM	Bypass valve closed
6/12/2012	11:22:53 AM	Bubbler valve closed
6/12/2012	11:22:53 AM	Main Vac valve opened
6/12/2012	11:22:53 AM	Helium MFC set to  0.000000
6/12/2012	11:22:53 AM	H2 MFC set to  0.000000
6/12/2012	11:22:53 AM	BCl3 MFC set to  0.000000
6/12/2012	11:22:53 AM	PH3 MFC set to  0.000000
6/12/2012	11:22:53 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:22:53 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:22:53 AM	Tube furnace set to 0
6/12/2012	11:22:54 AM	Run finished at 11:22 AM
6/12/2012	11:22:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/12/2012	11:45:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/12/2012	11:45:23 AM	Recipe started at 11:45 AM
6/12/2012	11:45:23 AM	Helium valve closed
6/12/2012	11:45:23 AM	H2 valve closed
6/12/2012	11:45:23 AM	BCl3 valve closed
6/12/2012	11:45:23 AM	PH3 valve closed
6/12/2012	11:45:23 AM	SiCl4 pre valve closed
6/12/2012	11:45:23 AM	SiCl4 post valve closed
6/12/2012	11:45:23 AM	Main Vac valve closed
6/12/2012	11:45:23 AM	Bubbler valve closed
6/12/2012	11:45:23 AM	Bypass valve opened
6/12/2012	11:45:23 AM	Helium MFC set to  0.000000
6/12/2012	11:45:23 AM	H2 MFC set to  0.000000
6/12/2012	11:45:23 AM	BCl3 MFC set to  0.000000
6/12/2012	11:45:23 AM	PH3 MFC set to  0.000000
6/12/2012	11:45:23 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:45:23 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:45:23 AM	Tube furnace set to 0
6/12/2012	11:45:24 AM	Helium valve closed
6/12/2012	11:45:24 AM	H2 valve closed
6/12/2012	11:45:24 AM	BCl3 valve closed
6/12/2012	11:45:24 AM	PH3 valve closed
6/12/2012	11:45:24 AM	SiCl4 pre valve closed
6/12/2012	11:45:24 AM	SiCl4 post valve closed
6/12/2012	11:45:24 AM	Main Vac valve closed
6/12/2012	11:45:24 AM	Bubbler valve closed
6/12/2012	11:45:24 AM	Bypass valve opened
6/12/2012	11:45:24 AM	Helium MFC set to  0.000000
6/12/2012	11:45:24 AM	H2 MFC set to  0.000000
6/12/2012	11:45:24 AM	BCl3 MFC set to  0.000000
6/12/2012	11:45:24 AM	PH3 MFC set to  0.000000
6/12/2012	11:45:24 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:45:24 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:45:24 AM	Tube furnace set to 0
6/12/2012	11:45:54 AM	Helium valve closed
6/12/2012	11:45:54 AM	H2 valve closed
6/12/2012	11:45:54 AM	BCl3 valve closed
6/12/2012	11:45:54 AM	PH3 valve closed
6/12/2012	11:45:54 AM	SiCl4 pre valve closed
6/12/2012	11:45:54 AM	SiCl4 post valve closed
6/12/2012	11:45:54 AM	Bypass valve closed
6/12/2012	11:45:54 AM	Bubbler valve closed
6/12/2012	11:45:54 AM	Main Vac valve opened
6/12/2012	11:45:54 AM	Helium MFC set to  0.000000
6/12/2012	11:45:54 AM	H2 MFC set to  0.000000
6/12/2012	11:45:54 AM	BCl3 MFC set to  0.000000
6/12/2012	11:45:54 AM	PH3 MFC set to  0.000000
6/12/2012	11:45:54 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:45:54 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:45:54 AM	Tube furnace set to 0
6/12/2012	11:46:24 AM	H2 valve closed
6/12/2012	11:46:24 AM	BCl3 valve closed
6/12/2012	11:46:24 AM	PH3 valve closed
6/12/2012	11:46:24 AM	SiCl4 pre valve closed
6/12/2012	11:46:24 AM	SiCl4 post valve closed
6/12/2012	11:46:24 AM	Bypass valve closed
6/12/2012	11:46:24 AM	Bubbler valve closed
6/12/2012	11:46:24 AM	Helium valve opened
6/12/2012	11:46:24 AM	Main Vac valve opened
6/12/2012	11:46:24 AM	Helium MFC set to  20.000000
6/12/2012	11:46:24 AM	H2 MFC set to  0.000000
6/12/2012	11:46:24 AM	BCl3 MFC set to  0.000000
6/12/2012	11:46:24 AM	PH3 MFC set to  0.000000
6/12/2012	11:46:24 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:46:24 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:46:24 AM	Tube furnace set to 0
6/12/2012	11:46:54 AM	Helium valve closed
6/12/2012	11:46:54 AM	H2 valve closed
6/12/2012	11:46:54 AM	BCl3 valve closed
6/12/2012	11:46:54 AM	PH3 valve closed
6/12/2012	11:46:54 AM	SiCl4 pre valve closed
6/12/2012	11:46:54 AM	SiCl4 post valve closed
6/12/2012	11:46:54 AM	Bypass valve closed
6/12/2012	11:46:54 AM	Bubbler valve closed
6/12/2012	11:46:54 AM	Main Vac valve opened
6/12/2012	11:46:54 AM	Helium MFC set to  0.000000
6/12/2012	11:46:54 AM	H2 MFC set to  0.000000
6/12/2012	11:46:54 AM	BCl3 MFC set to  0.000000
6/12/2012	11:46:54 AM	PH3 MFC set to  0.000000
6/12/2012	11:46:54 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:46:54 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:46:55 AM	Tube furnace set to 0
6/12/2012	11:47:25 AM	H2 valve closed
6/12/2012	11:47:25 AM	BCl3 valve closed
6/12/2012	11:47:25 AM	PH3 valve closed
6/12/2012	11:47:25 AM	SiCl4 pre valve closed
6/12/2012	11:47:25 AM	SiCl4 post valve closed
6/12/2012	11:47:25 AM	Bypass valve closed
6/12/2012	11:47:25 AM	Bubbler valve closed
6/12/2012	11:47:25 AM	Helium valve opened
6/12/2012	11:47:25 AM	Main Vac valve opened
6/12/2012	11:47:25 AM	Helium MFC set to  20.000000
6/12/2012	11:47:25 AM	H2 MFC set to  0.000000
6/12/2012	11:47:25 AM	BCl3 MFC set to  0.000000
6/12/2012	11:47:25 AM	PH3 MFC set to  0.000000
6/12/2012	11:47:25 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:47:25 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:47:25 AM	Tube furnace set to 0
6/12/2012	11:47:55 AM	Helium valve closed
6/12/2012	11:47:55 AM	H2 valve closed
6/12/2012	11:47:55 AM	BCl3 valve closed
6/12/2012	11:47:55 AM	PH3 valve closed
6/12/2012	11:47:55 AM	SiCl4 pre valve closed
6/12/2012	11:47:55 AM	SiCl4 post valve closed
6/12/2012	11:47:55 AM	Bypass valve closed
6/12/2012	11:47:55 AM	Bubbler valve closed
6/12/2012	11:47:55 AM	Main Vac valve opened
6/12/2012	11:47:55 AM	Helium MFC set to  0.000000
6/12/2012	11:47:55 AM	H2 MFC set to  0.000000
6/12/2012	11:47:55 AM	BCl3 MFC set to  0.000000
6/12/2012	11:47:55 AM	PH3 MFC set to  0.000000
6/12/2012	11:47:55 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:47:55 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:47:55 AM	Tube furnace set to 0
6/12/2012	11:48:25 AM	H2 valve closed
6/12/2012	11:48:25 AM	BCl3 valve closed
6/12/2012	11:48:25 AM	PH3 valve closed
6/12/2012	11:48:25 AM	SiCl4 pre valve closed
6/12/2012	11:48:25 AM	SiCl4 post valve closed
6/12/2012	11:48:25 AM	Bypass valve closed
6/12/2012	11:48:25 AM	Bubbler valve closed
6/12/2012	11:48:25 AM	Helium valve opened
6/12/2012	11:48:25 AM	Main Vac valve opened
6/12/2012	11:48:25 AM	Helium MFC set to  20.000000
6/12/2012	11:48:25 AM	H2 MFC set to  0.000000
6/12/2012	11:48:25 AM	BCl3 MFC set to  0.000000
6/12/2012	11:48:25 AM	PH3 MFC set to  0.000000
6/12/2012	11:48:25 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:48:25 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:48:25 AM	Tube furnace set to 0
6/12/2012	11:48:55 AM	Helium valve closed
6/12/2012	11:48:55 AM	H2 valve closed
6/12/2012	11:48:55 AM	BCl3 valve closed
6/12/2012	11:48:55 AM	PH3 valve closed
6/12/2012	11:48:55 AM	SiCl4 pre valve closed
6/12/2012	11:48:55 AM	SiCl4 post valve closed
6/12/2012	11:48:55 AM	Bypass valve closed
6/12/2012	11:48:55 AM	Bubbler valve closed
6/12/2012	11:48:55 AM	Main Vac valve opened
6/12/2012	11:48:55 AM	Helium MFC set to  0.000000
6/12/2012	11:48:55 AM	H2 MFC set to  0.000000
6/12/2012	11:48:55 AM	BCl3 MFC set to  0.000000
6/12/2012	11:48:55 AM	PH3 MFC set to  0.000000
6/12/2012	11:48:55 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:48:55 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:48:55 AM	Tube furnace set to 0
6/12/2012	11:49:26 AM	H2 valve closed
6/12/2012	11:49:26 AM	BCl3 valve closed
6/12/2012	11:49:26 AM	PH3 valve closed
6/12/2012	11:49:26 AM	SiCl4 pre valve closed
6/12/2012	11:49:26 AM	SiCl4 post valve closed
6/12/2012	11:49:26 AM	Bypass valve closed
6/12/2012	11:49:26 AM	Bubbler valve closed
6/12/2012	11:49:26 AM	Helium valve opened
6/12/2012	11:49:26 AM	Main Vac valve opened
6/12/2012	11:49:26 AM	Helium MFC set to  20.000000
6/12/2012	11:49:26 AM	H2 MFC set to  0.000000
6/12/2012	11:49:26 AM	BCl3 MFC set to  0.000000
6/12/2012	11:49:26 AM	PH3 MFC set to  0.000000
6/12/2012	11:49:26 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:49:26 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:49:26 AM	Tube furnace set to 0
6/12/2012	11:49:56 AM	Helium valve closed
6/12/2012	11:49:56 AM	H2 valve closed
6/12/2012	11:49:56 AM	BCl3 valve closed
6/12/2012	11:49:56 AM	PH3 valve closed
6/12/2012	11:49:56 AM	SiCl4 pre valve closed
6/12/2012	11:49:56 AM	SiCl4 post valve closed
6/12/2012	11:49:56 AM	Bypass valve closed
6/12/2012	11:49:56 AM	Bubbler valve closed
6/12/2012	11:49:56 AM	Main Vac valve opened
6/12/2012	11:49:56 AM	Helium MFC set to  0.000000
6/12/2012	11:49:56 AM	H2 MFC set to  0.000000
6/12/2012	11:49:56 AM	BCl3 MFC set to  0.000000
6/12/2012	11:49:56 AM	PH3 MFC set to  0.000000
6/12/2012	11:49:56 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:49:56 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:49:56 AM	Tube furnace set to 0
6/12/2012	11:50:26 AM	H2 valve closed
6/12/2012	11:50:26 AM	BCl3 valve closed
6/12/2012	11:50:26 AM	PH3 valve closed
6/12/2012	11:50:26 AM	SiCl4 pre valve closed
6/12/2012	11:50:26 AM	SiCl4 post valve closed
6/12/2012	11:50:26 AM	Bypass valve closed
6/12/2012	11:50:26 AM	Bubbler valve closed
6/12/2012	11:50:26 AM	Helium valve opened
6/12/2012	11:50:26 AM	Main Vac valve opened
6/12/2012	11:50:26 AM	Helium MFC set to  20.000000
6/12/2012	11:50:26 AM	H2 MFC set to  0.000000
6/12/2012	11:50:26 AM	BCl3 MFC set to  0.000000
6/12/2012	11:50:26 AM	PH3 MFC set to  0.000000
6/12/2012	11:50:26 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:50:26 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:50:26 AM	Tube furnace set to 0
6/12/2012	11:50:56 AM	Helium valve closed
6/12/2012	11:50:56 AM	H2 valve closed
6/12/2012	11:50:56 AM	BCl3 valve closed
6/12/2012	11:50:56 AM	PH3 valve closed
6/12/2012	11:50:56 AM	SiCl4 pre valve closed
6/12/2012	11:50:56 AM	SiCl4 post valve closed
6/12/2012	11:50:56 AM	Bypass valve closed
6/12/2012	11:50:56 AM	Bubbler valve closed
6/12/2012	11:50:56 AM	Main Vac valve opened
6/12/2012	11:50:56 AM	Helium MFC set to  0.000000
6/12/2012	11:50:56 AM	H2 MFC set to  0.000000
6/12/2012	11:50:56 AM	BCl3 MFC set to  0.000000
6/12/2012	11:50:56 AM	PH3 MFC set to  0.000000
6/12/2012	11:50:56 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:50:56 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:50:56 AM	Tube furnace set to 0
6/12/2012	11:51:26 AM	H2 valve closed
6/12/2012	11:51:26 AM	BCl3 valve closed
6/12/2012	11:51:26 AM	PH3 valve closed
6/12/2012	11:51:26 AM	SiCl4 pre valve closed
6/12/2012	11:51:26 AM	SiCl4 post valve closed
6/12/2012	11:51:26 AM	Bypass valve closed
6/12/2012	11:51:26 AM	Bubbler valve closed
6/12/2012	11:51:26 AM	Helium valve opened
6/12/2012	11:51:26 AM	Main Vac valve opened
6/12/2012	11:51:26 AM	Helium MFC set to  20.000000
6/12/2012	11:51:26 AM	H2 MFC set to  0.000000
6/12/2012	11:51:27 AM	BCl3 MFC set to  0.000000
6/12/2012	11:51:27 AM	PH3 MFC set to  0.000000
6/12/2012	11:51:27 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:51:27 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:51:27 AM	Tube furnace set to 0
6/12/2012	11:51:57 AM	Helium valve closed
6/12/2012	11:51:57 AM	H2 valve closed
6/12/2012	11:51:57 AM	BCl3 valve closed
6/12/2012	11:51:57 AM	PH3 valve closed
6/12/2012	11:51:57 AM	SiCl4 pre valve closed
6/12/2012	11:51:57 AM	SiCl4 post valve closed
6/12/2012	11:51:57 AM	Bypass valve closed
6/12/2012	11:51:57 AM	Bubbler valve closed
6/12/2012	11:51:57 AM	Main Vac valve opened
6/12/2012	11:51:57 AM	Helium MFC set to  0.000000
6/12/2012	11:51:57 AM	H2 MFC set to  0.000000
6/12/2012	11:51:57 AM	BCl3 MFC set to  0.000000
6/12/2012	11:51:57 AM	PH3 MFC set to  0.000000
6/12/2012	11:51:57 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:51:57 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:51:57 AM	Tube furnace set to 0
6/12/2012	11:52:27 AM	H2 valve closed
6/12/2012	11:52:27 AM	BCl3 valve closed
6/12/2012	11:52:27 AM	PH3 valve closed
6/12/2012	11:52:27 AM	SiCl4 pre valve closed
6/12/2012	11:52:27 AM	SiCl4 post valve closed
6/12/2012	11:52:27 AM	Bypass valve closed
6/12/2012	11:52:27 AM	Bubbler valve closed
6/12/2012	11:52:27 AM	Helium valve opened
6/12/2012	11:52:27 AM	Main Vac valve opened
6/12/2012	11:52:27 AM	Helium MFC set to  20.000000
6/12/2012	11:52:27 AM	H2 MFC set to  0.000000
6/12/2012	11:52:27 AM	BCl3 MFC set to  0.000000
6/12/2012	11:52:27 AM	PH3 MFC set to  0.000000
6/12/2012	11:52:27 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:52:27 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:52:27 AM	Tube furnace set to 0
6/12/2012	11:52:57 AM	Helium valve closed
6/12/2012	11:52:57 AM	H2 valve closed
6/12/2012	11:52:57 AM	BCl3 valve closed
6/12/2012	11:52:57 AM	PH3 valve closed
6/12/2012	11:52:57 AM	SiCl4 pre valve closed
6/12/2012	11:52:57 AM	SiCl4 post valve closed
6/12/2012	11:52:57 AM	Bypass valve closed
6/12/2012	11:52:57 AM	Bubbler valve closed
6/12/2012	11:52:57 AM	Main Vac valve opened
6/12/2012	11:52:57 AM	Helium MFC set to  0.000000
6/12/2012	11:52:57 AM	H2 MFC set to  0.000000
6/12/2012	11:52:57 AM	BCl3 MFC set to  0.000000
6/12/2012	11:52:57 AM	PH3 MFC set to  0.000000
6/12/2012	11:52:57 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:52:57 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:52:57 AM	Tube furnace set to 0
6/12/2012	11:53:27 AM	H2 valve closed
6/12/2012	11:53:27 AM	BCl3 valve closed
6/12/2012	11:53:27 AM	PH3 valve closed
6/12/2012	11:53:27 AM	SiCl4 pre valve closed
6/12/2012	11:53:27 AM	SiCl4 post valve closed
6/12/2012	11:53:27 AM	Bypass valve closed
6/12/2012	11:53:27 AM	Bubbler valve closed
6/12/2012	11:53:27 AM	Helium valve opened
6/12/2012	11:53:27 AM	Main Vac valve opened
6/12/2012	11:53:27 AM	Helium MFC set to  20.000000
6/12/2012	11:53:27 AM	H2 MFC set to  0.000000
6/12/2012	11:53:27 AM	BCl3 MFC set to  0.000000
6/12/2012	11:53:27 AM	PH3 MFC set to  0.000000
6/12/2012	11:53:27 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:53:27 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:53:28 AM	Tube furnace set to 0
6/12/2012	11:53:58 AM	Helium valve closed
6/12/2012	11:53:58 AM	H2 valve closed
6/12/2012	11:53:58 AM	BCl3 valve closed
6/12/2012	11:53:58 AM	PH3 valve closed
6/12/2012	11:53:58 AM	SiCl4 pre valve closed
6/12/2012	11:53:58 AM	SiCl4 post valve closed
6/12/2012	11:53:58 AM	Bypass valve closed
6/12/2012	11:53:58 AM	Bubbler valve closed
6/12/2012	11:53:58 AM	Main Vac valve opened
6/12/2012	11:53:58 AM	Helium MFC set to  0.000000
6/12/2012	11:53:58 AM	H2 MFC set to  0.000000
6/12/2012	11:53:58 AM	BCl3 MFC set to  0.000000
6/12/2012	11:53:58 AM	PH3 MFC set to  0.000000
6/12/2012	11:53:58 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:53:58 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:53:58 AM	Tube furnace set to 0
6/12/2012	11:54:28 AM	H2 valve closed
6/12/2012	11:54:28 AM	BCl3 valve closed
6/12/2012	11:54:28 AM	PH3 valve closed
6/12/2012	11:54:28 AM	SiCl4 pre valve closed
6/12/2012	11:54:28 AM	SiCl4 post valve closed
6/12/2012	11:54:28 AM	Bypass valve closed
6/12/2012	11:54:28 AM	Bubbler valve closed
6/12/2012	11:54:28 AM	Helium valve opened
6/12/2012	11:54:28 AM	Main Vac valve opened
6/12/2012	11:54:28 AM	Helium MFC set to  20.000000
6/12/2012	11:54:28 AM	H2 MFC set to  0.000000
6/12/2012	11:54:28 AM	BCl3 MFC set to  0.000000
6/12/2012	11:54:28 AM	PH3 MFC set to  0.000000
6/12/2012	11:54:28 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:54:28 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:54:28 AM	Tube furnace set to 0
6/12/2012	11:54:58 AM	Helium valve closed
6/12/2012	11:54:58 AM	H2 valve closed
6/12/2012	11:54:58 AM	BCl3 valve closed
6/12/2012	11:54:58 AM	PH3 valve closed
6/12/2012	11:54:58 AM	SiCl4 pre valve closed
6/12/2012	11:54:58 AM	SiCl4 post valve closed
6/12/2012	11:54:58 AM	Bypass valve closed
6/12/2012	11:54:58 AM	Bubbler valve closed
6/12/2012	11:54:58 AM	Main Vac valve opened
6/12/2012	11:54:58 AM	Helium MFC set to  0.000000
6/12/2012	11:54:58 AM	H2 MFC set to  0.000000
6/12/2012	11:54:58 AM	BCl3 MFC set to  0.000000
6/12/2012	11:54:58 AM	PH3 MFC set to  0.000000
6/12/2012	11:54:58 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:54:58 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:54:58 AM	Tube furnace set to 0
6/12/2012	11:55:28 AM	H2 valve closed
6/12/2012	11:55:28 AM	BCl3 valve closed
6/12/2012	11:55:28 AM	PH3 valve closed
6/12/2012	11:55:28 AM	SiCl4 pre valve closed
6/12/2012	11:55:28 AM	SiCl4 post valve closed
6/12/2012	11:55:28 AM	Bypass valve closed
6/12/2012	11:55:28 AM	Bubbler valve closed
6/12/2012	11:55:28 AM	Helium valve opened
6/12/2012	11:55:28 AM	Main Vac valve opened
6/12/2012	11:55:28 AM	Helium MFC set to  20.000000
6/12/2012	11:55:28 AM	H2 MFC set to  0.000000
6/12/2012	11:55:28 AM	BCl3 MFC set to  0.000000
6/12/2012	11:55:28 AM	PH3 MFC set to  0.000000
6/12/2012	11:55:28 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:55:28 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:55:29 AM	Tube furnace set to 0
6/12/2012	11:55:59 AM	Helium valve closed
6/12/2012	11:55:59 AM	H2 valve closed
6/12/2012	11:55:59 AM	BCl3 valve closed
6/12/2012	11:55:59 AM	PH3 valve closed
6/12/2012	11:55:59 AM	SiCl4 pre valve closed
6/12/2012	11:55:59 AM	SiCl4 post valve closed
6/12/2012	11:55:59 AM	Bypass valve closed
6/12/2012	11:55:59 AM	Bubbler valve closed
6/12/2012	11:55:59 AM	Main Vac valve opened
6/12/2012	11:55:59 AM	Helium MFC set to  0.000000
6/12/2012	11:55:59 AM	H2 MFC set to  0.000000
6/12/2012	11:55:59 AM	BCl3 MFC set to  0.000000
6/12/2012	11:55:59 AM	PH3 MFC set to  0.000000
6/12/2012	11:55:59 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:55:59 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:55:59 AM	Tube furnace set to 0
6/12/2012	11:56:00 AM	Run finished at 11:56 AM
6/12/2012	11:56:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/12/2012	11:58:19 AM	Recipe started at 11:58 AM
6/12/2012	11:58:19 AM	Helium valve closed
6/12/2012	11:58:19 AM	H2 valve closed
6/12/2012	11:58:19 AM	BCl3 valve closed
6/12/2012	11:58:19 AM	PH3 valve closed
6/12/2012	11:58:19 AM	SiCl4 pre valve closed
6/12/2012	11:58:19 AM	SiCl4 post valve closed
6/12/2012	11:58:19 AM	Main Vac valve closed
6/12/2012	11:58:19 AM	Bypass valve closed
6/12/2012	11:58:19 AM	Bubbler valve closed
6/12/2012	11:58:19 AM	Helium MFC set to  0.000000
6/12/2012	11:58:19 AM	H2 MFC set to  0.000000
6/12/2012	11:58:19 AM	BCl3 MFC set to  0.000000
6/12/2012	11:58:19 AM	PH3 MFC set to  0.000000
6/12/2012	11:58:19 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:58:19 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:58:19 AM	Tube furnace set to 0
6/12/2012	11:58:22 AM	Helium valve closed
6/12/2012	11:58:22 AM	BCl3 valve closed
6/12/2012	11:58:22 AM	PH3 valve closed
6/12/2012	11:58:22 AM	SiCl4 pre valve closed
6/12/2012	11:58:22 AM	SiCl4 post valve closed
6/12/2012	11:58:22 AM	Main Vac valve closed
6/12/2012	11:58:22 AM	Bypass valve closed
6/12/2012	11:58:22 AM	Bubbler valve closed
6/12/2012	11:58:22 AM	H2 valve opened
6/12/2012	11:58:22 AM	Helium MFC set to  0.000000
6/12/2012	11:58:22 AM	H2 MFC set to  500.000000
6/12/2012	11:58:22 AM	BCl3 MFC set to  0.000000
6/12/2012	11:58:22 AM	PH3 MFC set to  0.000000
6/12/2012	11:58:22 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:58:22 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:58:22 AM	Tube furnace set to 0
6/12/2012	11:59:39 AM	Helium valve closed
6/12/2012	11:59:39 AM	BCl3 valve closed
6/12/2012	11:59:39 AM	PH3 valve closed
6/12/2012	11:59:39 AM	SiCl4 pre valve closed
6/12/2012	11:59:39 AM	SiCl4 post valve closed
6/12/2012	11:59:39 AM	Main Vac valve closed
6/12/2012	11:59:39 AM	Bypass valve closed
6/12/2012	11:59:39 AM	H2 valve opened
6/12/2012	11:59:39 AM	Bubbler valve opened
6/12/2012	11:59:39 AM	Helium MFC set to  0.000000
6/12/2012	11:59:39 AM	H2 MFC set to  500.000000
6/12/2012	11:59:39 AM	BCl3 MFC set to  0.000000
6/12/2012	11:59:39 AM	PH3 MFC set to  0.000000
6/12/2012	11:59:39 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:59:39 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:59:39 AM	Tube furnace set to 0
6/12/2012	11:59:40 AM	Helium valve closed
6/12/2012	11:59:40 AM	BCl3 valve closed
6/12/2012	11:59:40 AM	PH3 valve closed
6/12/2012	11:59:40 AM	SiCl4 pre valve closed
6/12/2012	11:59:40 AM	SiCl4 post valve closed
6/12/2012	11:59:40 AM	Main Vac valve closed
6/12/2012	11:59:40 AM	Bypass valve closed
6/12/2012	11:59:40 AM	H2 valve opened
6/12/2012	11:59:40 AM	Bubbler valve opened
6/12/2012	11:59:40 AM	Helium MFC set to  0.000000
6/12/2012	11:59:40 AM	H2 MFC set to  500.000000
6/12/2012	11:59:40 AM	BCl3 MFC set to  0.000000
6/12/2012	11:59:40 AM	PH3 MFC set to  0.000000
6/12/2012	11:59:40 AM	SiCl4 MFC set to  0.000000
6/12/2012	11:59:40 AM	Bypass solenoid MFC set to  0.000000
6/12/2012	11:59:40 AM	Tube furnace set to 950
6/12/2012	12:19:40 PM	Helium valve closed
6/12/2012	12:19:40 PM	PH3 valve closed
6/12/2012	12:19:40 PM	Main Vac valve closed
6/12/2012	12:19:40 PM	Bypass valve closed
6/12/2012	12:19:40 PM	H2 valve opened
6/12/2012	12:19:40 PM	BCl3 valve opened
6/12/2012	12:19:40 PM	SiCl4 pre valve opened
6/12/2012	12:19:40 PM	SiCl4 post valve opened
6/12/2012	12:19:40 PM	Bubbler valve opened
6/12/2012	12:19:40 PM	Helium MFC set to  0.000000
6/12/2012	12:19:40 PM	H2 MFC set to  500.000000
6/12/2012	12:19:40 PM	BCl3 MFC set to  1.000000
6/12/2012	12:19:40 PM	PH3 MFC set to  0.000000
6/12/2012	12:19:40 PM	SiCl4 MFC set to  25.000000
6/12/2012	12:19:40 PM	Bypass solenoid MFC set to  0.000000
6/12/2012	12:19:41 PM	Tube furnace set to 950
6/12/2012	12:39:41 PM	Helium valve closed
6/12/2012	12:39:41 PM	BCl3 valve closed
6/12/2012	12:39:41 PM	PH3 valve closed
6/12/2012	12:39:41 PM	SiCl4 pre valve closed
6/12/2012	12:39:41 PM	SiCl4 post valve closed
6/12/2012	12:39:41 PM	Main Vac valve closed
6/12/2012	12:39:41 PM	Bypass valve closed
6/12/2012	12:39:41 PM	H2 valve opened
6/12/2012	12:39:41 PM	Bubbler valve opened
6/12/2012	12:39:41 PM	Helium MFC set to  0.000000
6/12/2012	12:39:41 PM	H2 MFC set to  500.000000
6/12/2012	12:39:41 PM	BCl3 MFC set to  0.000000
6/12/2012	12:39:41 PM	PH3 MFC set to  0.000000
6/12/2012	12:39:41 PM	SiCl4 MFC set to  0.000000
6/12/2012	12:39:41 PM	Bypass solenoid MFC set to  0.000000
6/12/2012	12:39:41 PM	Tube furnace set to 750
6/12/2012	12:44:41 PM	H2 valve closed
6/12/2012	12:44:41 PM	BCl3 valve closed
6/12/2012	12:44:41 PM	PH3 valve closed
6/12/2012	12:44:41 PM	SiCl4 pre valve closed
6/12/2012	12:44:41 PM	SiCl4 post valve closed
6/12/2012	12:44:41 PM	Main Vac valve closed
6/12/2012	12:44:41 PM	Bypass valve closed
6/12/2012	12:44:41 PM	Helium valve opened
6/12/2012	12:44:41 PM	Bubbler valve opened
6/12/2012	12:44:41 PM	Helium MFC set to  500.000000
6/12/2012	12:44:41 PM	H2 MFC set to  0.000000
6/12/2012	12:44:41 PM	BCl3 MFC set to  0.000000
6/12/2012	12:44:41 PM	PH3 MFC set to  0.000000
6/12/2012	12:44:41 PM	SiCl4 MFC set to  0.000000
6/12/2012	12:44:41 PM	Bypass solenoid MFC set to  0.000000
6/12/2012	12:44:41 PM	Tube furnace set to 0
6/12/2012	12:59:22 PM	Run aborted at 12:59 PM
6/12/2012	12:59:22 PM	Helium valve closed
6/12/2012	12:59:22 PM	H2 valve closed
6/12/2012	12:59:22 PM	BCl3 valve closed
6/12/2012	12:59:22 PM	PH3 valve closed
6/12/2012	12:59:22 PM	SiCl4 pre valve closed
6/12/2012	12:59:22 PM	SiCl4 post valve closed
6/12/2012	12:59:22 PM	Bypass valve closed
6/12/2012	12:59:22 PM	Main Vac valve closed
6/12/2012	12:59:22 PM	Bubbler valve closed
6/12/2012	12:59:22 PM	Helium MFC set to  0.000000
6/12/2012	12:59:22 PM	H2 MFC set to  0.000000
6/12/2012	12:59:22 PM	BCl3 MFC set to  0.000000
6/12/2012	12:59:22 PM	PH3 MFC set to  0.000000
6/12/2012	12:59:22 PM	SiCl4 MFC set to  0.000000
6/12/2012	12:59:22 PM	Tube furnace set to 0
6/12/2012	1:02:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/12/2012	1:02:22 PM	Recipe started at 1:02 PM
6/12/2012	1:02:22 PM	Helium valve closed
6/12/2012	1:02:22 PM	H2 valve closed
6/12/2012	1:02:22 PM	BCl3 valve closed
6/12/2012	1:02:22 PM	PH3 valve closed
6/12/2012	1:02:22 PM	SiCl4 pre valve closed
6/12/2012	1:02:22 PM	SiCl4 post valve closed
6/12/2012	1:02:22 PM	Main Vac valve closed
6/12/2012	1:02:22 PM	Bubbler valve closed
6/12/2012	1:02:22 PM	Bypass valve opened
6/12/2012	1:02:22 PM	Helium MFC set to  0.000000
6/12/2012	1:02:22 PM	H2 MFC set to  0.000000
6/12/2012	1:02:22 PM	BCl3 MFC set to  0.000000
6/12/2012	1:02:22 PM	PH3 MFC set to  0.000000
6/12/2012	1:02:22 PM	SiCl4 MFC set to  0.000000
6/12/2012	1:02:22 PM	Bypass solenoid MFC set to  0.000000
6/12/2012	1:02:22 PM	Tube furnace set to 0
6/12/2012	1:03:29 PM	Helium valve closed
6/12/2012	1:03:29 PM	H2 valve closed
6/12/2012	1:03:29 PM	BCl3 valve closed
6/12/2012	1:03:29 PM	PH3 valve closed
6/12/2012	1:03:29 PM	SiCl4 pre valve closed
6/12/2012	1:03:29 PM	SiCl4 post valve closed
6/12/2012	1:03:29 PM	Main Vac valve closed
6/12/2012	1:03:29 PM	Bubbler valve closed
6/12/2012	1:03:29 PM	Bypass valve opened
6/12/2012	1:03:29 PM	Helium MFC set to  0.000000
6/12/2012	1:03:29 PM	H2 MFC set to  0.000000
6/12/2012	1:03:29 PM	BCl3 MFC set to  0.000000
6/12/2012	1:03:29 PM	PH3 MFC set to  0.000000
6/12/2012	1:03:29 PM	SiCl4 MFC set to  0.000000
6/12/2012	1:03:29 PM	Bypass solenoid MFC set to  0.000000
6/12/2012	1:03:29 PM	Tube furnace set to 0
6/12/2012	1:04:29 PM	Helium valve closed
6/12/2012	1:04:29 PM	H2 valve closed
6/12/2012	1:04:29 PM	BCl3 valve closed
6/12/2012	1:04:29 PM	PH3 valve closed
6/12/2012	1:04:29 PM	SiCl4 pre valve closed
6/12/2012	1:04:29 PM	SiCl4 post valve closed
6/12/2012	1:04:29 PM	Bypass valve closed
6/12/2012	1:04:29 PM	Bubbler valve closed
6/12/2012	1:04:29 PM	Main Vac valve opened
6/12/2012	1:04:29 PM	Helium MFC set to  0.000000
6/12/2012	1:04:29 PM	H2 MFC set to  0.000000
6/12/2012	1:04:29 PM	BCl3 MFC set to  0.000000
6/12/2012	1:04:29 PM	PH3 MFC set to  0.000000
6/12/2012	1:04:29 PM	SiCl4 MFC set to  0.000000
6/12/2012	1:04:29 PM	Bypass solenoid MFC set to  0.000000
6/12/2012	1:04:29 PM	Tube furnace set to 0
6/12/2012	1:04:30 PM	Run finished at 1:04 PM
6/12/2012	1:04:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
